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Modeling mechanical stress effect on dopant diffusion in scaled MOSFETs (2005)

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by Yi-ming Sheu , Sheng-jier Yang , Chih-chiang Wang , Chih-sheng Chang , Li-ping Huang , Tsung-yi Huang , Ming-jer Chen , Senior Member , Carlos H. Diaz , Senior Member
Venue:IEEE Trans. Electron Devices
Citations:2 - 0 self