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A Distributed Software Architecture for Semiconductor Process Design (1998)
BibTeX
@MISC{Mcilrath98adistributed,
author = {Michael B. Mcilrath and Donald E. Troxel and Matthew D. Verminski and Matthew D. Verminski},
title = {A Distributed Software Architecture for Semiconductor Process Design},
year = {1998}
}
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Abstract
Computer representations for semiconductor fabrication processes are currently not well defined for distributed computing. This work focuses on defining and implementing an open, distributed software architecture for designing semiconductor fabrication processes. The implementation of the architecture provides a common interface to semiconductor process repositories, a life cycle service to manage the distributed objects, various means for organizing distributed repositories, and clear component definitions to enable a trader to find and manage available services. The base interfaces and services are essential in the development of distributed and shared applications for semiconductor process design. Thesis Supervisor: Michael B. McIlrath Title: Research Scientist, Electrical Engineering and Computer Science Thesis Supervisor: Donald E. Troxel Title: Professor of Electrical Engineering and Computer Science Acknowledgments There are many people who have provided me with feedback, hel...
Keyphrases
distributed software architecture semiconductor process design electrical engineering many people available service clear component definition distributed repository thesis supervisor base interface computer representation process repository common interface computer science thesis supervisor distributed computing life cycle service semiconductor fabrication process various mean troxel title distributed object mcilrath title semiconductor fabrication computer science acknowledgment research scientist
