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Frequency-Selective MEMS for Miniaturized Low-Power Communication Devices (1999)
| Citations: | 36 - 12 self |
BibTeX
@MISC{Nguyen99frequency-selectivemems,
author = {Clark T.-C. Nguyen},
title = {Frequency-Selective MEMS for Miniaturized Low-Power Communication Devices},
year = {1999}
}
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Abstract
With Q’s in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as integratedcircuit-compatible tanks for use in the low phase-noise oscillators and highly selective filters of communications subsystems. To date, LF oscillators have been fully integrated using merged CMOS/microstructure technologies, and bandpass filters consisting of spring-coupled micromechanical resonators have been demonstrated in a frequency range from HF to VHF. In particular, two-resonator micromechanical bandpass filters have been demonstrated with frequencies up to 35 MHz, percent bandwidths on the order of 0.2%, and insertion losses less than 2 dB. Higher order three-resonator filters with frequencies near 455 kHz have also been achieved, with equally impressive insertion losses for 0.09 % bandwidths, and with more than 64 dB of passband rejection. Additionally, free-free-beam single-pole resonators have recently been realized with frequencies up to 92 MHz and ’s around 8000. Evidence suggests that the ultimate frequency range of this high- tank technology depends upon material limitations, as well as design constraints, in particular, to the degree of electromechanical coupling achievable in microscale resonators.
Keyphrases
miniaturized low-power communication device frequency-selective mem frequency range two-resonator micromechanical bandpass filter lf oscillator low phase-noise oscillator percent bandwidth spring-coupled micromechanical resonator high tank technology insertion loss cmos microstructure technology free-free-beam single-pole resonator passband rejection bandpass filter microscale resonator selective filter material limitation integratedcircuit-compatible tank impressive insertion loss order three-resonator filter communication subsystem ultimate frequency range design constraint
