### Citations

128 | Micromachined inertial sensors, in: - Yazdi, Ayazi, et al. - 1998 |

22 |
Micromachined vibratory rate gyroscopes,
- Clark
- 1997
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Citation Context ...− ... |

13 | Two types of micromachined vibratory gyroscopes,” - Shkel, Acar, et al. - 2005 |

10 | Micromachined gyroscopes: challenges, design solutions, and opportunities,” - Shkel - 2001 |

8 |
A sub-0.2∘/hr bias driftmicromechanical silicon gyroscope with automatic CMOS mode-matching,”
- Sharma, Zaman, et al.
- 2009
(Show Context)
Citation Context ...licon microgyroscopes, used for measurement of angular rate or angle of a rotating carrier, have a lot of merits, such as low power consumption, small volume and weight, high shock resistivity, and suitability for batch fabrication [1– 5]. However, the performance of silicon microgyroscopes is lower than conventional mechanical, rotating wheel, fiberoptical, and ring laser gyroscopes [6]. Thus, it is necessary to improve the performance so as to broaden their application market. Large vibration amplitude of drive mode is one of the conditions for silicon gyroscopes to achieve high performance [7, 8]. Therefore, capacitive actuators of more combs and smaller gaps are designed in microgyroscopes so as to increase the vibration amplitude when the same drive voltage is applied. However, when gaps become small and the vibration amplitude gets large, the nonlinear terms of the force applied on proof mass can become sufficiently high to bend the amplitude-frequency characteristic curve. For the traditional drive methodology, drive mode works at the natural frequency in the linear amplitude-frequency characteristic curve. However, when the amplitude-frequency characteristic curve is nonlinear, t... |

8 |
Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method,”
- Veijola, Mattila
- 2001
(Show Context)
Citation Context ...y for the drive mode of silicon gyroscopes is not yet noticed. Nonlinear dynamics of MEMS resonators has been studied analytically, numerically, and experimentally by some institutions [9–14]. In these literatures, dynamic models are constructed to match the theoretical characteristic curves with the experimental phenomena of real resonator samples [11, 12]. The models can be solved by different methods, such as the theoretical method of multiple scales [10], the semianalytical harmonic method [9], the numerical integration method [9–11], and the electrical equivalent-circuit modelling method [14]. It is known that the nonlinear Hindawi Publishing Corporation Journal of Sensors Volume 2014, Article ID 801618, 11 pages http://dx.doi.org/10.1155/2014/801618 2 Journal of Sensors o 1 2 3 4 5 6 5 7 4 Y X Figure 1: Simplified schematic of drive mode in ... |

6 |
A High-Q In-Plane SOI Tuning Fork Gyroscope",
- Sharma, Zaman, et al.
(Show Context)
Citation Context ...licon microgyroscopes, used for measurement of angular rate or angle of a rotating carrier, have a lot of merits, such as low power consumption, small volume and weight, high shock resistivity, and suitability for batch fabrication [1– 5]. However, the performance of silicon microgyroscopes is lower than conventional mechanical, rotating wheel, fiberoptical, and ring laser gyroscopes [6]. Thus, it is necessary to improve the performance so as to broaden their application market. Large vibration amplitude of drive mode is one of the conditions for silicon gyroscopes to achieve high performance [7, 8]. Therefore, capacitive actuators of more combs and smaller gaps are designed in microgyroscopes so as to increase the vibration amplitude when the same drive voltage is applied. However, when gaps become small and the vibration amplitude gets large, the nonlinear terms of the force applied on proof mass can become sufficiently high to bend the amplitude-frequency characteristic curve. For the traditional drive methodology, drive mode works at the natural frequency in the linear amplitude-frequency characteristic curve. However, when the amplitude-frequency characteristic curve is nonlinear, t... |

5 | Stability, nonlinear and reliability of electrostatically actuated MEMS devices. Sensors
- Zhang, Meng, et al.
- 2007
(Show Context)
Citation Context ...consecutively by a certain step and the other is to decrease it by the same step. It must be pointed out that, at each frequency sweeping step, the initial status of the displacement and velocity as well as the phase of applied voltage is maintained equal to the value at the finish time of the previous frequency step. 4.2. Influence of Initial Status. When drive voltage is applied with ... |

4 |
Modelling the dynamics of a MEMS resonator: Simulations and experiments, Sensors and actuators A 142
- Mestrom, Fey, et al.
- 2008
(Show Context)
Citation Context ...racteristic curve. For the traditional drive methodology, drive mode works at the natural frequency in the linear amplitude-frequency characteristic curve. However, when the amplitude-frequency characteristic curve is nonlinear, the drive methodology for the drive mode of silicon gyroscopes is not yet noticed. Nonlinear dynamics of MEMS resonators has been studied analytically, numerically, and experimentally by some institutions [9–14]. In these literatures, dynamic models are constructed to match the theoretical characteristic curves with the experimental phenomena of real resonator samples [11, 12]. The models can be solved by different methods, such as the theoretical method of multiple scales [10], the semianalytical harmonic method [9], the numerical integration method [9–11], and the electrical equivalent-circuit modelling method [14]. It is known that the nonlinear Hindawi Publishing Corporation Journal of Sensors Volume 2014, Article ID 801618, 11 pages http://dx.doi.org/10.1155/2014/801618 2 Journal of Sensors o 1 2 3 4 5 6 5 7 4 Y X Figure 1: Simplified schematic of drive mode in ... |

3 |
Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators”,
- Elshurafa, Khirallah, et al.
- 2011
(Show Context)
Citation Context ...linear amplitude-frequency characteristic curve. However, when the amplitude-frequency characteristic curve is nonlinear, the drive methodology for the drive mode of silicon gyroscopes is not yet noticed. Nonlinear dynamics of MEMS resonators has been studied analytically, numerically, and experimentally by some institutions [9–14]. In these literatures, dynamic models are constructed to match the theoretical characteristic curves with the experimental phenomena of real resonator samples [11, 12]. The models can be solved by different methods, such as the theoretical method of multiple scales [10], the semianalytical harmonic method [9], the numerical integration method [9–11], and the electrical equivalent-circuit modelling method [14]. It is known that the nonlinear Hindawi Publishing Corporation Journal of Sensors Volume 2014, Article ID 801618, 11 pages http://dx.doi.org/10.1155/2014/801618 2 Journal of Sensors o 1 2 3 4 5 6 5 7 4 Y X Figure 1: Simplified schematic of drive mode in ... |

3 | Nonlinear behavior of SOI freefree micromechanical beam resonator,” - Palaniapan, Khine - 2008 |

2 |
Simulations and experiments of hardening and softening resonances in a clamped-clamped beam
- Mestrom, Fey, et al.
- 2010
(Show Context)
Citation Context ...racteristic curve. For the traditional drive methodology, drive mode works at the natural frequency in the linear amplitude-frequency characteristic curve. However, when the amplitude-frequency characteristic curve is nonlinear, the drive methodology for the drive mode of silicon gyroscopes is not yet noticed. Nonlinear dynamics of MEMS resonators has been studied analytically, numerically, and experimentally by some institutions [9–14]. In these literatures, dynamic models are constructed to match the theoretical characteristic curves with the experimental phenomena of real resonator samples [11, 12]. The models can be solved by different methods, such as the theoretical method of multiple scales [10], the semianalytical harmonic method [9], the numerical integration method [9–11], and the electrical equivalent-circuit modelling method [14]. It is known that the nonlinear Hindawi Publishing Corporation Journal of Sensors Volume 2014, Article ID 801618, 11 pages http://dx.doi.org/10.1155/2014/801618 2 Journal of Sensors o 1 2 3 4 5 6 5 7 4 Y X Figure 1: Simplified schematic of drive mode in ... |

1 | Weiguanxing yibiao yu weixitong, Weapon Industry Press, - Wang, Huang, et al. - 2011 |

1 |
Nonlinear dynamics of vibrating
- Braghin, Resta, et al.
- 2007
(Show Context)
Citation Context ... curve. However, when the amplitude-frequency characteristic curve is nonlinear, the drive methodology for the drive mode of silicon gyroscopes is not yet noticed. Nonlinear dynamics of MEMS resonators has been studied analytically, numerically, and experimentally by some institutions [9–14]. In these literatures, dynamic models are constructed to match the theoretical characteristic curves with the experimental phenomena of real resonator samples [11, 12]. The models can be solved by different methods, such as the theoretical method of multiple scales [10], the semianalytical harmonic method [9], the numerical integration method [9–11], and the electrical equivalent-circuit modelling method [14]. It is known that the nonlinear Hindawi Publishing Corporation Journal of Sensors Volume 2014, Article ID 801618, 11 pages http://dx.doi.org/10.1155/2014/801618 2 Journal of Sensors o 1 2 3 4 5 6 5 7 4 Y X Figure 1: Simplified schematic of drive mode in ... |

1 | A quadrature error and offset error suppression circuitry for Silicon MicroGyroscope,” - Yang, Zhou, et al. - 2008 |

1 | Structural scheme design and simulation of structure-decoupled dual-mass - Yin, Wang, et al. - 2008 |

1 | Design and test of quadrature correction structure for silicon micro-gyroscope,” - Ni, Li, et al. - 2013 |