Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators (0)

by L C Popa, D Weinstein
Venue:in Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, 2013