Structured Design of Microelectromechanical Systems

Structured Design of Microelectromechanical Systems

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by Tamal Mukherjee , Gary K. Fedder

Venue:	in Proceedings of the 1997 Design Automation Conference
Citations:	14 - 3 self

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Datum	Value	Source
TITLE	Structured Design of Microelectromechanical Systems	INFERENCE
AUTHOR NAME	Tamal Mukherjee	SVM HeaderParse 0.2
AUTHOR AFFIL	Department of Electrical and Computer Engineering and; The Robotics Institute; Carnegie Mellon University	SVM HeaderParse 0.2
AUTHOR ADDR	Pittsburgh, PA, 15213-3890	SVM HeaderParse 0.2
AUTHOR NAME	Gary K. Fedder	SVM HeaderParse 0.2
AUTHOR AFFIL	Department of Electrical and Computer Engineering and; The Robotics Institute; Carnegie Mellon University	SVM HeaderParse 0.2
AUTHOR ADDR	Pittsburgh, PA, 15213-3890	SVM HeaderParse 0.2
ABSTRACT	In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of interconnected lumpedparameter elements. An initial library focuses on suspended-MEMS technology from which inertial sensors and other mechanical mechanisms can be designed. The schematic representation has a simulation interface enabling the designer to simulate the design at the component level. Synthesis of MEMS cells for common topologies provides the system designer with rapid, optimized component layout and associated macro-models. A synthesis module is developed for the popular folded-flexure micromechanical resonator topology. The algorithm minimizes a combination of total layout area and voltage applied to the electromechanical actuators. Synthesis results clearly show the design limits of behavioral parameters such as resonant frequency for a fixed process technology.	SVM HeaderParse 0.2
VENUE	in Proceedings of the 1997 Design Automation Conference	INFERENCE
VENUE TYPE	CONFERENCE	INFERENCE
PAGES	9--13	INFERENCE
CITATIONS	22 found	ParsCit 1.0