Modeling and simulating optical MEMS using Chatoyant
BibTeX
@MISC{Kurzweg_modelingand,
author = {Timothy P. Kurzweg and Steven P. Levitan and Philippe J. Marchand and Jose A. Martinez and Kurt R. Prough and Donald M. Chiarulli},
title = {Modeling and simulating optical MEMS using Chatoyant},
year = {}
}
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Abstract
The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1x2 optical MEM interferometer switch. Keywords: MEMS-CAD, optical MEMS, MOEMS, micro-optics 1. INTRODUCTION Applications for optical MEMS (micro-electrical-mechanical systems) are growing to include scanning, projection, display, switching, printing, sensing, modulating, and data storage. 24 As these applications are quickly evolving from abstract ideas to marketable products, it is essential to have CAD tools to model t...
