Single-Crystal Silicon Actuator Arrays For Micro Manipulation Tasks (1996)
| Venue: | IN PROC. IEEE WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS |
| Citations: | 32 - 24 self |
BibTeX
@INPROCEEDINGS{Böhringer96single-crystalsilicon,
author = {Karl-Friedrich Böhringer and Bruce Randall Donald and Noel C. MacDonald},
title = {Single-Crystal Silicon Actuator Arrays For Micro Manipulation Tasks},
booktitle = {IN PROC. IEEE WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS},
year = {1996},
pages = {7--12},
publisher = {}
}
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Abstract
Arrays of electrostatic MEMS actuators have been fabricated using a modified, multi-layer SCREAM (Single-Crystal Reactive Etching and Metallization) process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon (SCS) tips. They can be used to generate a force field for the manipulation of small, flat objects. Calculations and experiments show that the actuator array is strong enough to move macroscopic parts. An individual actuator can generate a force of approximately 10 #N and a displacementof 5 µm. Monolithic arrays have been built reaching a size of up to 10 cm², with up to 15,000 individual single-crystal silicon actuators on one chip. Weinvestigate micro actuators for manipulation tasks, and discuss important issues and trade-offs in design, processing and fabrication. We describe manipulation experiments in which small, #at objects where lifted and moved. We conclude with an outlook on applications of programmable actuator array...
