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A 32-site Neural Recording Probe Fabricated by Double-Sided Deep Reactive Ion Etching of Silicon-on-Insulator Substrates (2001)

by Peter Norlin , Maria Kindlundh , Aliette Mouroux , Ken Yoshida , Winnie Jensen , Ulrich G. Hofmann , Med Universität Zu Lübeck
Venue:J Micromech Microeng
Citations:20 - 2 self