A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics (1999)
| Venue: | IEEE Journal of Solid-State Circuits |
| Citations: | 12 - 3 self |
BibTeX
@ARTICLE{Lemkin99athree-axis,
author = {Mark Lemkin and Bernhard E. Boser},
title = {A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics},
journal = {IEEE Journal of Solid-State Circuits},
year = {1999},
volume = {34},
pages = {456--468}
}
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Abstract
Abstract — This paper describes a three-axis accelerometer implemented in a surface-micromachining technology with integrated CMOS. The accelerometer measures changes in a capacitive half-bridge to detect deflections of a proof mass, which result from acceleration input. The half-bridge is connected to a fully differential position-sense interface, the output of which is used for one-bit force feedback. By enclosing the proof mass in a one-bit feedback loop, simultaneous force balancing and analog-to-digital conversion are achieved. On-chip digital offset-trim electronics enable compensation of random offset in the electronic interface. Analytical performance calculations are shown to accurately model device behavior. The fabricated singlechip accelerometer measures 4 2 4mm P, draws 27 mA from a 5-V supply, and has a dynamic range of 84, 81, and 70 dB along the �-, �-, and �-axes, respectively. Index Terms—Accelerometer, calibration, force balance, microelectromechanical systems (MEMS), sensor, sigma–delta.
