|
7
|
Electrostatic Comb Drive of Lateral Polysilicon Resonators
– W C Tang, T-C H Nguyen, M W Judy, R T Howe
- 1990
|
|
19
|
Simulation of microelectromechanical systems
– G K Fedder
- 1994
|
|
7
|
Automated Optimal Synthesis of Microresonators
– G K Fedder, T Mukherjee
|
|
4
|
Nodal Simulation of Suspended MEMS with Multiple Degrees of Freedom
– J E Vandemeer, M S Kranz, G K Fedder
- 1621
|
|
4
|
CAD and Foundries for Microsystems
– J. M. Karam, B. Courtois, H. Boutamine, P. Drake, A. Poppe, V. Szekely, M. Rencz, K. Hofmann, M. Glesner, Rg Qb Uk
- 1997
|
|
4
|
Hierarchical representation and simulation of micromachined inertial sensors
– J E Vandemeer, M S Kranz, G K Fedder
- 1998
|
|
3
|
Multi-Mode Sensitive Layout Synthesis of Microresonators
– Sitaraman Iyer, Tamal Mukherjee, Gary K. Fedder
|
|
10
|
for Microelectromechanical Systems
– S D Senturia, “CAD
- 1995
|
|
6
|
Nodal Design of Actuators and Sensors (NODAS
– J E Vandemeer
- 1997
|
|
17
|
Micromachining for optical and Optoelectronic Systems
– M C Wu
- 1997
|
|
452
|
Ptolemy: A Framework for Simulating and Prototyping Heterogeneous Systems
– Joseph Buck, Soonhoi Ha, Edward A. Lee, David G. Messerschmitt
- 1992
|
|
3
|
Physical Design for Surface-Micromachined MEMS
– Gary K. Fedder, Tamal Mukherjee
- 1996
|
|
4
|
A design flow for micromachined electromechanical systems
– N Swart
- 1999
|
|
6
|
SOLIDIS: A Tool for Microactuator Simulation in 3-D
– J M Funk, J G Korvink, J Bühler, M Båchtold, H Baltes
- 1997
|
|
3
|
Nodal analysis for MEMS simulation and design
– J Clark, N Zhou, S Brown, K S J Pister
- 1998
|
|
6
|
CMOS Micromechanical Bandpass Filter Design Using a Hierarchical MEMS Circuit Library
– Q Jing, H Luo, T Mukherjee, L R Carley, G K Fedder
- 2000
|
|
4
|
Behavioral Modelling of Analog Blocks using the
– I Getreu
- 1989
|
|
11
|
Electrophysics of micromechanical comb actuators
– W A Johnson, L K Warne
- 1995
|
|
4
|
Micro-opto-mechanical devices and on-chip optical processing
– M E Motamedi, M C Wu, K S J Pister
- 1997
|
