New manufacturing concepts for ultra-thin silicon and gallium arsenide substrates (0)

by K Bock, M Bleier, O Köthe, C Landesberger
Venue:International Conference on Compound Semiconductor MANufacturing TECHnology (GaAs MANTECH) 18, 2003, Scottsdale/Ariz., Proceedings, Scottsdale, Ariz., 2003, ISBN