The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 2 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 2 9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The array was programmed to do simple linear and diagonal translations and squeeze-, centering-, and rotating-field manipulations. All three tasks were demonstrated using silicon pieces of various shapes and either 0.55 mm or 0.10 mm thick. [365] Index Terms---Actuator, array, CMOS, integration, micromanipulation, polyimide. I. INTRODUCTION O NE of the potential applications of MEMS actuators is in the moving and positioning of small parts because the actuators themselves are on a similar scale [1]. Toward the realization of this goal, researchers have bee...