In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of interconnected lumpedparameter elements. An initial library focuses on suspended-MEMS technology from which inertial sensors and other mechanical mechanisms can be designed. The schematic representation has a simulation interface enabling the designer to simulate the design at the component level. Synthesis of MEMS cells for common topologies provides the system designer with rapid, optimized component layout and associated macro-models. A synthesis module is developed for the popular folded-flexure micromechanical resonator topology. The algorithm minimizes a combination of total layout area and voltage applied to the electromechanical actuators. Synthesis results clearly show the design limits of behavioral parameters such as resonant frequency for a fixed process technology.

In this paper, we consider the case for adopting a truly `digital ' type of robot, which would evolve between a discrete and nite set of states. We adopt the point of view that the advantages of traditional robotic evolution (over the full range of a continuous domain) are often negated by complexities associated with the continuous world. The types of discrete robots discussed in this paper would keep this unwanted continuous-time `genie ' in a `box ' of discrete `steps ' during its operation. One distinct advantage of this philosophy is that a formal logical analysis can then be applied to the digital robots, since discrete-time models now correctly and completely model the robot behavior. We argue that there are signi cant bene ts to this strategy in numerous cases, especially with respect to fault detection and fault tolerance. However, there arealso disadvantages- in order to guarantee digital behavior, constraints on the robot's operations are imposed. Essentially, we gain formality of digital analysis at the expense of precision of continuous movement. Using an analogy to digital electronics, we discuss ways in which the development of digital robots could revolutionize certain aspects of robotics. 1