this paper influence of the interface roughness (between the different resonator layers) on F-P filter performance is analysed.

MEMS are usually designed for measuring one parameter and on-chip co-integration of sensor (microstructure) and readout circuits is often pursued. In a multi-parameter measurement system, yield considerations and fabrication compatibility problems favor micro-instruments based on active Si-MCM techniques. The generic device is based on a stacked structure with a universally applicable active silicon MCM platform that contains all the infrastructural functions of a measurement system. Customizing the microsystem requires flip-chip attach of sensor dies and a commercially available microcontroller die, which is subsequently programmed for the intended application. The micro-instrument features a data pre-processing capability to provide high-level data (e.g. spectral information rather than raw sensor data) and to communicate with a host processor intelligently. The micro-instrument has been used to enhance the resolution of a single-chip 16-channel CMOS microspectrometer. This chip con...