Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications," in (2010)

by F Chen, M Spencer, R Nathanael, C Wang, H Fariborzi, A Gupta, H Kam, V Pott, J Jeon, T King-Liu, D Markovic, V Stojanovic, E Alon
Venue:Proc. IEEE Int. Solid-State Circuits Conf. Tech. Dig.,