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Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks
by J. W. Suh, R. B. Darling, K.-F. Böhringer, B. R. Donald, H. Baltes, G. T. Kovacs — 2000 — IN PROC. 2000 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION
…Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks J. W. Suh R. B…
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