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A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools
by P. Gupta, A. B. Kahng, D. Sylvester, J. Yang — 2003 — Proc. ACM/IEEE DAC
…A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools ∗ P. Gupta…
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